Virtual SEM

Part IIB - Module 4B7: VLSI Design, Technology & CAD

This topic provides additional resources for the University of Cambridge Department of Engineering EIST 4B7 module. The aim of this module is to describe the design, technology and manufacture of MOS integrated circuits and future nanoscale electron devices. This VSEM topic particularly concentrates on the SEM related aspects of the module. The course may only be accessed by CUED 4B7 students.